Precision MEMS IMU Module Features: Triaxial, digital gyroscope ±125°/sec, ±500°/sec, ±2000°/sec dynamic range models 2°/hr in-run bias stability (ADIS16467-1) 0.15°/√hr angular random walk (ADIS16467-1 and ADIS16467-2) ±0.05° axis to axis misalignment error Triaxial, digital accelerometer, ±40 g 13 μg in-run bias stability Triaxial, delta angle, and delta velocity outputs Factory calibrated sensitivity, bias, and axial alignment Calibration temperature range: −40°C to +85°C SPI-compatible data communications Programmable operation and control Automatic and manual bias correction controls Data ready indicator for synchronous data acquisition External sync modes: direct, pulse, scaled, and output On demand self test of inertial sensors On demand self test of flash memory Single-supply operation (VDD): 3.0 V to 3.6 V 2000 g mechanical shock survivability Operating temperature range: −40°C to +105°C

Precision MEMS IMU Module Features: Triaxial, digital gyroscope ±125°/sec, ±500°/sec, ±2000°/sec dynamic range models 2°/hr in-run bias stability (ADIS16467-1) 0.15°/√hr angular random walk (ADIS16467-1 and ADIS16467-2) ±0.05° axis to axis misalignment error Triaxial, digital accelerometer, ±40 g 13 μg in-run bias stability Triaxial, delta angle, and delta velocity outputs Factory calibrated sensitivity, bias, and axial alignment Calibration temperature range: −40°C to +85°C SPI-compatible data communications Programmable operation and control Automatic and manual bias correction controls Data ready indicator for synchronous data acquisition External sync modes: direct, pulse, scaled, and output On demand self test of inertial sensors On demand self test of flash memory Single-supply operation (VDD): 3.0 V to 3.6 V 2000 g mechanical shock survivability Operating temperature range: −40°C to +105°C

Precision, Miniature MEMS IMU Features: Triaxial, digital gyroscope ±2000°/sec dynamic range 8.1°/hr in-run bias stability 0.29°/√hr angular random walk, x-axis and y-axis, 1 σ ±0.25° axis to axis misalignment error Triaxial, digital accelerometer, ±392 m/sec2 dynamic range 125 μm/sec2 in-run bias stability Triaxial, delta angle and delta velocity outputs Factory calibrated sensitivity, bias, and axial alignment Calibration temperature range: −10°C to +75°C SPI compatible data communications Programmable operation and control Automatic and manual bias correction controls Data ready indicator for synchronous data acquisition External sync modes: direct, scaled, and output On demand self-test of inertial sensors On demand self-test of flash memory Single-supply operation (VDD): 3.0 V to 3.6 V 19,600 m/sec2 mechanical shock survivability Operating temperature range: −25°C to +85°C

Precision, Miniature MEMS IMU Features: Triaxial, digital gyroscope ±125°/sec, ±500°/sec, ±2000°/sec dynamic range models 2.3°/hr in-run bias stability (ADIS16507-1) 0.13°/√hr angular random walk, x-axis and y-axis, 1 σ (ADIS16507-1) ±0.25° axis to axis misalignment error Triaxial, digital accelerometer, ±392 m/sec2 dynamic range 125 μm/sec2 in-run bias stability, x-axis and y-axis, 1 σ Triaxial, delta angle and delta velocity outputs Factory calibrated sensitivity, bias, and axial alignment Calibration temperature range: −40°C to +85°C SPI compatible data communications Programmable operation and control Automatic and manual bias correction controls Data ready indicator for synchronous data acquisition External sync modes: direct, scaled, and output On demand self-test of inertial sensors On demand self-test of flash memory Single-supply operation (VDD): 3.0 V to 3.6 V 19,600 m/sec2 mechanical shock survivability Operating temperature range: −40°C to +105°C

Integrated AMR Angle Sensor and Signal Conditioner with Differential Outputs Features: Contactless angular measurement High precision 180° angle sensor Typical angular error of ±0.1° Low output noise of 850 μV rms Sine and cosine differential outputs Ratiometric analog voltage outputs Negligible hysteresis SAR or Σ-Δ ADC compatible Temperature compensated AMR bridge Industrial temperature range: −40°C to +125°C Automotive temperature range: −40°C to +150°C EMI resistant Fault diagnostics VDD from 2.7 V to 5.5 V Minimal phase error of 0.85° at 30,000 rpm AEC-Q100 qualified for automotive applications Single chip solution Available in an 8-lead SOIC package

TEMPERATURE SENSOR ROHS COMPLIANT: YES

TEMPERATURE SENSOR ROHS COMPLIANT: YES

Low Noise, Wide Bandwidth, MEMS Accelerometer Features: Single, in-plane axis accelerometer with analog output Full-scale range: ±200 g Linear frequency response range: dc to 15 kHz typical (3 dB point) Resonant frequency: 28 kHz typical Sensitivity performance Sensitivity stability over temperature within ± 5% Linearity to ±0.2% of full-scale range Cross-axis sensitivity ± 1%/± 0.8% (z-axis acceleration effect on x-axis, y-axis acceleration effect on x-axis) Ultralow noise density 45 μg/√Hz Overrange sensing plus dc coupling allows fast recovery time Complete electromechanical self test Single-supply operation Output voltage ratiometric to supply Low power consumption: 1.0 mA typical Power saving standby operation mode with fast recovery RoHS compliant −40°C to +125°C temperature range 32-lead, 5 mm × 5 mm × 1.8 mm LFCSP package

Low Noise, Wide Bandwidth, MEMS Accelerometer Features: Single, in plane axis accelerometer with analog output Full-scale range: ±100 g Linear frequency response range: dc to 23 kHz typical (3 dB point) Resonant frequency: 42 kHz typical Ultralow noise density: 75 μg/√Hz Overrange sensing plus dc coupling allows fast recovery time Complete electromechanical self test Single-supply operation Output voltage ratiometric to supply Low power consumption: 1.0 mA typical Power saving standby operation mode with fast recovery RoHS compliant −40°C to +125°C operating temperature range 32-lead, 5 mm × 5 mm × 1.80 mm LFCSP package See datasheet for additional features

Small, Low Power, 3-Axis, 16 g Accelerometer Features: 3-axis sensing with ±16 g minimum measurement range Small, low profile package 12-lead, 4 mm × 4 mm × 1.45 mm LFCSP Low quiescent supply current: 350 µA typical Single-supply operation: 1.8 V to 3.6 V 10,000 g shock survivalExcellent temperature stabilityBandwidth (BW) adjustment with a single capacitor per axisRoHS/WEEE lead-free compliant40C to +105C operating temperature rangeQualified for automotive applications