Low Noise, Low Drift, Low Power, 3-Axis MEMS Accelerometers with Digital Output Features: Hermetic package offers optimal long-term stability 0 g offset vs. temperature (all axes): 0.75 mg/°C maximum Ultralow noise spectral density (all axes): 75 μg/√Hz Low power, VSUPPLY (LDO regulator enabled) Measurement mode: 200 μA Standby mode: 21 μA Digital output features Digital SPI and limited I2C interfaces supported 20-bit ADC Data interpolation routine for synchronous sampling Programmable high- and low-pass digital filters Integrated temperature sensor Voltage range options VSUPPLY with internal regulators: 2.25 V to 3.6 V V1P8ANA, V1P8DIG with internal LDO regulator bypassed: 1.8 V typical ± 10% Operating temperature range: −40°C to +125°C 14-terminal, 6 mm × 5.6 mm × 2.2 mm, LCC package

3-Axis, 200 g Digital MEMS Accelerometer Features: Low power: as low as 35 µA in measurement mode and 0.1 µA in standby mode at VS = 2.5 V (typical) Power consumption scales automatically with bandwidth Embedded, 32-level FIFO buffer minimizes processor load Bandwidth of up to 1 kHz Bandwidth selectable via serial command Shock event detection Activity/inactivity monitoring Supply voltage range: 2.0 V to 3.6 V I/O voltage range: 1.7 V to VS SPI (3- or 4-wire) and I2C digital interfaces Wide temperature range: −40°C to +85°C 10,000 g shock survival Pb free/RoHS compliant Small and thin: 3 mm × 5 mm × 1 mm LGA packageADXL375-EP supports defense and aerospace applications (AQEC standard)Download ADXL375-EP Data Sheet (pdf)Extended industrial temperature range: −55°C to +105°CControlled manufacturing baseline1 assembly/test site1 fabrication siteProduct change notificationQualification data available on requestV62/ 18612 DSCC Drawing Number

Integrated AMR Angle Sensor and Signal Conditioner with Differential Outputs Features: Contactless angular measurement High precision 180° angle sensor Typical angular error of ±0.1° Low output noise of 850 μV rms Sine and cosine differential outputs Ratiometric analog voltage outputs Negligible hysteresis SAR or Σ-Δ ADC compatible Temperature compensated AMR bridge Industrial temperature range: −40°C to +125°C Automotive temperature range: −40°C to +150°C EMI resistant Fault diagnostics VDD from 2.7 V to 5.5 V Minimal phase error of 0.85° at 30,000 rpm AEC-Q100 qualified for automotive applications Single chip solution Available in an 8-lead SOIC package

Integrated AMR Angle Sensor and Signal Conditioner with Differential Outputs Features: Contactless angular measurement High precision 180° angle sensor Typical angular error of ±0.1° Low output noise of 850 μV rms Sine and cosine differential outputs Ratiometric analog voltage outputs Negligible hysteresis SAR or Σ-Δ ADC compatible Temperature compensated AMR bridge Industrial temperature range: −40°C to +125°C Automotive temperature range: −40°C to +150°C EMI resistant Fault diagnostics VDD from 2.7 V to 5.5 V Minimal phase error of 0.85° at 30,000 rpm AEC-Q100 qualified for automotive applications Single chip solution Available in an 8-lead SOIC package

Precision MEMS IMU Module Features: Triaxial, digital gyroscope  ±125°/sec, ±500°/sec, ±2000°/sec dynamic range models 2°/hr in-run bias stability (ADIS16465-1)  0.15°/√hr angular random walk (ADIS16465-1 and ADIS16465-2)  ±0.05° axis to axis misalignment error  Triaxial, digital accelerometer, ±8 g 3.6 μg in-run bias stability Triaxial, delta angle, and delta velocity outputs Factory calibrated sensitivity, bias, and axial alignment Calibration temperature range: −40°C to +85°C   SPI-compatible data communications Programmable operation and control  Automatic and manual bias correction controls Data ready indicator for synchronous data acquisition External sync modes: direct, pulse, scaled, and output On demand self test of inertial sensors On demand self test of flash memory Single-supply operation (VDD): 3.0 V to 3.6 V 2000 g mechanical shock survivability Operating temperature range: −40°C to +105°C

Precision, Miniature MEMS IMU Features: Triaxial, digital gyroscope ±125°/sec, ±500°/sec, ±2000°/sec dynamic range models 2.3°/hr in-run bias stability (ADIS16507-1) 0.13°/√hr angular random walk, x-axis and y-axis, 1 σ (ADIS16507-1) ±0.25° axis to axis misalignment error Triaxial, digital accelerometer, ±392 m/sec2 dynamic range 125 μm/sec2 in-run bias stability, x-axis and y-axis, 1 σ Triaxial, delta angle and delta velocity outputs Factory calibrated sensitivity, bias, and axial alignment Calibration temperature range: −40°C to +85°C SPI compatible data communications Programmable operation and control Automatic and manual bias correction controls Data ready indicator for synchronous data acquisition External sync modes: direct, scaled, and output On demand self-test of inertial sensors On demand self-test of flash memory Single-supply operation (VDD): 3.0 V to 3.6 V 19,600 m/sec2 mechanical shock survivability Operating temperature range: −40°C to +105°C

Integrated Optical Module with Ambient Light Rejection and Two LEDs Features: 3.8 mm × 5.0 mm × 0.9 mm module with integrated optical components 2 green LEDs, 2 PDs with IR cut filter 2 external sensor inputs 3, 370 mA LED drivers 20-bit burst accumulator enabling 20 bits per sample period On-board sample to sample accumulator enabling up to 27 bits per data read Custom optical package made to work under a glass window Optimized SNR for signal limited cases I2C or SPI communications

Low Noise, Wide Bandwidth, MEMS Accelerometer Features: Single, in plane axis accelerometer with analog output Full-scale range: ±100 g Linear frequency response range: dc to 23 kHz typical (3 dB point) Resonant frequency: 42 kHz typical Ultralow noise density: 75 μg/√Hz Overrange sensing plus dc coupling allows fast recovery time Complete electromechanical self test Single-supply operation Output voltage ratiometric to supply Low power consumption: 1.0 mA typical Power saving standby operation mode with fast recovery RoHS compliant −40°C to +125°C operating temperature range 32-lead, 5 mm × 5 mm × 1.80 mm LFCSP package See datasheet for additional features

200 g Range, 3-Axis Digital Accelerometer Features: ±200 g measurement range Low power: 170 μA in measurement mode and 17 μA in standby mode at VS = 2.5 V (typical) User selectable bandwidth up to 3200 Hz ODR Fixed 13-bit output resolution Supply voltage range: 2.0 V to 3.6 V Embedded memory management system with FIFO technology minimizes host processor load Shock event detection Activity/inactivity monitoring SPI (3- or 4-wire) and I2C digital interfaces Wide temperature range: −40 to +125°C 10,000 g shock survival Pb free and RoHS compliant Small and thin: 32-lead, 5 mm × 5 mm × 1.45 mm LFCSP AEC-Q100 qualified for automotive applications

Temperature Sensor: 10-Bit Digital in 6-Lead SOT-23 Features: 10-Bit Temperature-to-Digital Converter –40°C to +125°C Operating Temperature Range ±2°C Accuracy SPI-and DSP-Compatible Serial Interface Shutdown Mode Space-Saving SOT-23 Package